CTI-Cryogenics Cryo-Torr 10 High-Vacuum Cryopump

The CTI-Cryogenics Cryo-Torr 10 (Part Number: 8018182G001R) is a high-capacity, 10-inch cryogenic vacuum pump engineered for ultra-high vacuum (UHV) applications, semiconductor fabrication, vacuum coating, and demanding R&D environments. Operating on closed-loop helium refrigeration, the Cryo-Torr 10 delivers fast, hydrocarbon-free water vapor and gas pumping without the risk of process contamination.

This specific configuration (8018182) features an ASA/ANSI inlet flange and an integrated silicon diode temperature sensor for real-time thermal monitoring during cooldown and active operation.

Key Features & Benefits

• Clean, Oil-Free High Vacuum: Traps water vapor, hydrocarbons, and process gases cryogenically, maintaining an ultra-clean process chamber.

• High Pumping Capacity: Engineered specifically for heavy-duty production tools requiring high gas throughput, delivering air pumping speeds up to 3,000 L/s and water vapor pumping up to 9,000 L/s.

• Silicon Diode Temperature Sensing: Equipped with a standard diode temperature sensor (PN 8018182 configuration) compatible with standard CTI and third-party temperature monitors.

• Robust ASA/ANSI Flange Interface: Heavy-duty bolt-circle flange design ensures tight metal-to-metal or elastomer sealing for industrial vacuum chambers.

• Low Maintenance Operation: Designed for long service intervals between regeneration cycles, minimizing tool downtime in high-volume manufacturing environments.

Technical Specifications