Edwards

CTI Cryo IS-320FX Cryopump

Part Number: 8185419G001
Condition: Refurbished
In Stock

The CTI-Cryogenics IS-320FX is a high-performance, integrated smart cryopump designed to deliver clean, oil-free high-vacuum environments for demanding semiconductor and industrial thin-film deposition applications. Equipped with advanced onboard control architecture, the IS-320FX features integrated drive electronics that streamline communication, automate regeneration, and continuously monitor system health. Its robust two-stage closed-loop Helium refrigeration design provides high water vapor and hydrogen pumping speeds, optimizing chamber pump-down times and maximizing process yield.

Technical Specifications

Parameter Specification Details
Part Number 8185419G001
Flange Size / Type ISO-320 / ANSI Flange Interface
Pumping Mechanism 2-Stage Gifford-McMahon (GM) Cryogenic Refrigerator
Control Architecture On-Board / IS-Series Integrated Smart Controller
Compressor Compatibility CTI 9600 Compressor Series / IS-compatible Helium Lines
First Stage Temp Range 65K – 80K
Second Stage Temp Range 10K – 20K
Regeneration Type Automated / Intelligent On-Board Cycle
Dimensions Approx. 22" H x 18" W x 16" D
Weight ~85 lbs (38.5 kg)

 

Target Applications

  • Semiconductor Wafer Processing (PVD, CVD, Etch)

  • Optical Coating & Thin-Film Deposition Systems

  • Flat Panel Display (FPD) Manufacturing

  • Industrial Surface Modification & Vacuum Metallurgy

  • High-Vacuum Research Chamber Environments

$9,549.00
$9,549.00
Shipping calculated at checkout.
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