Alcatel / Adixen ATH 31 C Corrosive-Duty Hybrid Turbomolecular Pump

The Alcatel ATH 31 C is a high-performance, ultra-compact hybrid turbomolecular pump specifically engineered for challenging analytical and light-semiconductor applications requiring exposure to aggressive or corrosive gases. The "C" designation marks its specialized corrosive-duty configuration, featuring a integrated gas purge system that introduces an inert sealing gas stream to actively shield the internal motor well and high-speed bearings from particulate buildup and chemical attack.

By integrating precision turbomolecular rotor stages with a secondary Holweck molecular drag stage, the ATH 31 C achieves exceptionally high compression ratios for light gases and a superior backing pressure tolerance of up to 25 mbar. This advanced hybrid staging allows the pump to safely exhaust into smaller, cost-effective oil-free backing configurations, such as standard multi-stage diaphragm (membrane) or small scroll pumps, without risking back-streaming.

• Manufacturer: Alcatel Vacuum Technology (Adixen / Pfeiffer Vacuum)

• Model Line: ATH Series (Hybrid Molecular Drag)

• Model Configuration: ATH 31 C (Corrosive / Purged Version)

• Standard Inlet Flange Options: Nude / DN 40 KF / DN 63 ISO-K

Key Features & Benefits

• Advanced Holweck Drag Staging: Features one multi-bladed turbomolecular stage paired with two specialized Holweck spiral helix channels to maximize light-gas compression profiles.

• Active Gas Purge System: Outfitted with a dedicated N2 injection port to create an overpressure barrier, extending bearing lifespan in harsh chemical processing environments.

• High Exhaust Pressure Tolerance: Handles foreline backing pressures up to 25 mbar, making it highly stable when integrated into compact benchtop instrumentation.

• Rugged Machined Rotor: Designed for high mechanical stability against accidental atmospheric venting shocks, gyroscopic shifting, and sudden thermal expansion.

• Versatile Mounting Configurations: Compact physical dimensions and low vibration signatures allow for easy 360-degree integration closer to the sampling chamber window.

Technical Specifications

Typical Applications

The unique backing flexibility and chemical resilience of the ATH 31 C position it perfectly within specialized high-vacuum instrument lines:

• Analytical Mass Spectrometry: Often integrated directly as a dedicated split-flow or localized turbo inside LC-MS, GC-MS, and Residual Gas Analyzers (RGAs) handling chemical ionization streams.

• Aggressive Gas Handling: Benchtop plasma cleaning, reactive sputter deposition chambers, and small-scale gas analysis ports.

• Helium Leak Detection: Serves as a rugged internal high-pressure backing turbo inside mobile or laboratory sniffing instruments.