{"product_id":"shimadzu-tmp-303lmc-a1-magnetically-levitated-turbomolecular-pump","title":"Shimadzu TMP-303LMC (A1) Magnetically Levitated Turbomolecular Pump","description":"\u003cp data-path-to-node=\"3\" id=\"p-rc_dfa0afe9bfd11562-67\"\u003eThe \u003cb data-path-to-node=\"3\" data-index-in-node=\"4\"\u003eShimadzu TMP-303LMC (A1)\u003c\/b\u003e is a high-throughput, magnetically levitated turbomolecular vacuum pump engineered specifically to handle both clean R\u0026amp;D processes and aggressive corrosive gas loads. \u003cspan class=\"citation-116\"\u003eFeaturing an advanced \u003c\/span\u003e\u003cb data-path-to-node=\"3\" data-index-in-node=\"218\"\u003e\u003cspan class=\"citation-116\"\u003e5-axis active magnetic bearing suspension system\u003c\/span\u003e\u003c\/b\u003e\u003cspan class=\"citation-116 citation-end-116\"\u003e, this pump completely eliminates mechanical friction, oil lubrication, and the risk of hydrocarbon back-streaming, ensuring an ultra-pure, contamination-free vacuum environment.\u003csup class=\"superscript\" data-turn-source-index=\"2\"\u003e\u003c\/sup\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cdiv class=\"source-inline-chip-container luminous-sources hide-from-message-actions ng-star-inserted\"\u003e\u003c\/div\u003e\n\u003cp data-path-to-node=\"4\" id=\"p-rc_dfa0afe9bfd11562-68\"\u003e\u003cspan class=\"citation-115\"\u003eThe \"LMC\" designation indicates that this model is equipped with specialized \u003c\/span\u003e\u003cb data-path-to-node=\"4\" data-index-in-node=\"77\"\u003e\u003cspan class=\"citation-115\"\u003eanti-corrosion rotor coatings\u003c\/span\u003e\u003c\/b\u003e\u003cspan class=\"citation-115 citation-end-115\"\u003e (typically nickel plating), making it exceptionally durable against highly reactive chemical processes used in semiconductor manufacturing, plasma etching, CVD, and thin-film deposition.\u003csup class=\"superscript\" data-turn-source-index=\"3\"\u003e\u003c\/sup\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cdiv class=\"source-inline-chip-container luminous-sources hide-from-message-actions ng-star-inserted\"\u003e\u003c\/div\u003e\n\u003cul data-path-to-node=\"5\"\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"5,0,0\"\u003e\u003cb data-path-to-node=\"5,0,0\" data-index-in-node=\"0\"\u003eActive Magnetic Bearings:\u003c\/b\u003e 5-axis levitation prevents contact wear, eliminates routine bearing maintenance, and ensures zero chemical degradation of lubricants.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"5,1,0\"\u003e\u003cb data-path-to-node=\"5,1,0\" data-index-in-node=\"0\"\u003eCorrosive Gas Protection:\u003c\/b\u003e Nickel-plated rotor blades and internal structural shielding resist chemical attack from aggressive process gases.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"5,2,0\" id=\"p-rc_dfa0afe9bfd11562-69\"\u003e\u003cb data-path-to-node=\"5,2,0\" data-index-in-node=\"0\"\u003eHigh Pumping Throughput:\u003c\/b\u003e \u003cspan class=\"citation-114 citation-end-114\"\u003eDelivers consistent, class-leading pumping speeds up to 320 L\/s for Nitrogen (\u003csup class=\"superscript\" data-turn-source-index=\"4\"\u003e\u003c\/sup\u003e\u003c\/span\u003e\u003cspan class=\"math-inline\" data-math=\"N_2\" data-index-in-node=\"103\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e\u003cspan class=\"mord mathnormal\"\u003eN\u003c\/span\u003e\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t vlist-t2\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e2\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-s\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"citation-113 citation-end-113\"\u003e).\u003csup class=\"superscript\" data-turn-source-index=\"5\"\u003e\u003c\/sup\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cdiv class=\"source-inline-chip-container luminous-sources hide-from-message-actions ng-star-inserted\"\u003e\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"5,3,0\" id=\"p-rc_dfa0afe9bfd11562-70\"\u003e\u003cb data-path-to-node=\"5,3,0\" data-index-in-node=\"0\"\u003eFlexible Mounting Configuration:\u003c\/b\u003e \u003cspan class=\"citation-112 citation-end-112\"\u003eThe absence of a liquid oil reservoir allows the pump to be mounted and operated in any physical orientation.\u003csup class=\"superscript\" data-turn-source-index=\"6\"\u003e\u003c\/sup\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cdiv class=\"source-inline-chip-container luminous-sources hide-from-message-actions ng-star-inserted\"\u003e\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"5,4,0\"\u003e\u003cb data-path-to-node=\"5,4,0\" data-index-in-node=\"0\"\u003eUltra-Low Vibration:\u003c\/b\u003e Active position sensors continually balance the rotor dynamically, keeping mechanical harmonics to an absolute minimum.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch2 data-path-to-node=\"7\"\u003eTechnical Specifications\u003c\/h2\u003e\n\u003cdiv class=\"horizontal-scroll-wrapper\"\u003e\n\u003cdiv class=\"table-block-component\"\u003e\n\u003cdiv class=\"table-block has-export-button new-table-style is-at-scroll-start is-at-scroll-end\"\u003e\n\u003cdiv class=\"table-content\" data-hveid=\"0\" data-ved=\"0CAAQ3ecQahgKEwjrv6q686yVAxUAAAAAHQAAAAAQ-AE\"\u003e\n\u003ctable data-path-to-node=\"8\"\u003e\n\u003cthead\u003e\n\u003ctr\u003e\n\u003cth\u003e\u003cspan data-path-to-node=\"8,0,0,0\"\u003eParameter\u003c\/span\u003e\u003c\/th\u003e\n\u003cth\u003e\u003cspan data-path-to-node=\"8,0,1,0\"\u003eSpecification\u003c\/span\u003e\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003c\/thead\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,1,0,0\"\u003e\u003cb data-path-to-node=\"8,1,0,0\" data-index-in-node=\"0\"\u003eManufacturer\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,1,1,0\"\u003eShimadzu Corporation (Japan)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,2,0,0\"\u003e\u003cb data-path-to-node=\"8,2,0,0\" data-index-in-node=\"0\"\u003eModel Number\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,2,1,0\"\u003eTMP-303LMC (Revision A1 Variant)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,3,0,0\"\u003e\u003cb data-path-to-node=\"8,3,0,0\" data-index-in-node=\"0\"\u003ePumping Speed (\u003cspan class=\"math-inline\" data-math=\"N_2\" data-index-in-node=\"15\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e\u003cspan class=\"mord mathnormal\"\u003eN\u003c\/span\u003e\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t vlist-t2\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e2\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-s\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e)\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,3,1,0\"\u003e\u003cspan class=\"math-inline\" data-math=\"320\\text{ L\/s}\" data-index-in-node=\"0\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e320\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e L\/s\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e (\u003cspan class=\"math-inline\" data-math=\"300\\text{ L\/s}\" data-index-in-node=\"16\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e300\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e L\/s\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e with protective net screen installed)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,4,0,0\"\u003e\u003cb data-path-to-node=\"8,4,0,0\" data-index-in-node=\"0\"\u003ePumping Speed (\u003cspan class=\"math-inline\" data-math=\"He\" data-index-in-node=\"15\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord mathnormal\"\u003eHe\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e \/ \u003cspan class=\"math-inline\" data-math=\"H_2\" data-index-in-node=\"20\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e\u003cspan class=\"mord mathnormal\"\u003eH\u003c\/span\u003e\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t vlist-t2\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e2\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-s\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e)\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,4,1,0\"\u003e\u003cspan class=\"math-inline\" data-math=\"340\\text{ L\/s}\" data-index-in-node=\"0\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e340\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e L\/s\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e \/ \u003cspan class=\"math-inline\" data-math=\"320\\text{ L\/s}\" data-index-in-node=\"17\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e320\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e L\/s\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,5,0,0\"\u003e\u003cb data-path-to-node=\"8,5,0,0\" data-index-in-node=\"0\"\u003eHigh-Vacuum Inlet Flange Options\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,5,1,0\"\u003eVG100 \/ ICF152 \/ ISO 100-B \/ ISO 100-C\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,6,0,0\"\u003e\u003cb data-path-to-node=\"8,6,0,0\" data-index-in-node=\"0\"\u003eForeline \/ Backing Connection\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,6,1,0\"\u003eDN 25 KF (NW25)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,7,0,0\"\u003e\u003cb data-path-to-node=\"8,7,0,0\" data-index-in-node=\"0\"\u003eCompression Ratio (\u003cspan class=\"math-inline\" data-math=\"N_2\" data-index-in-node=\"19\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e\u003cspan class=\"mord mathnormal\"\u003eN\u003c\/span\u003e\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t vlist-t2\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e2\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-s\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e)\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,7,1,0\"\u003e\u003cspan class=\"math-inline\" data-math=\"1 \\times 10^9\" data-index-in-node=\"0\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e1\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003cspan class=\"mbin\"\u003e×\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e1\u003c\/span\u003e\u003cspan class=\"mord\"\u003e0\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e9\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,8,0,0\"\u003e\u003cb data-path-to-node=\"8,8,0,0\" data-index-in-node=\"0\"\u003eUltimate Pressure\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,8,1,0\"\u003e\u003cspan class=\"math-inline\" data-math=\"\\le 10^{-7}\\text{ Pa}\" data-index-in-node=\"0\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mrel\"\u003e≤\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e1\u003c\/span\u003e\u003cspan class=\"mord\"\u003e0\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e−7\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e Pa\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e order (Corrosive series baseline)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,9,0,0\"\u003e\u003cb data-path-to-node=\"8,9,0,0\" data-index-in-node=\"0\"\u003eRated Speed\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,9,1,0\"\u003e\u003cspan class=\"math-inline\" data-math=\"45,000\\text{ RPM}\" data-index-in-node=\"0\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e45\u003c\/span\u003e\u003cspan class=\"mpunct\"\u003e,\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e000\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e RPM\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,10,0,0\"\u003e\u003cb data-path-to-node=\"8,10,0,0\" data-index-in-node=\"0\"\u003eStart-up \/ Ramp-up Time\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,10,1,0\"\u003e\u003cspan class=\"math-inline\" data-math=\"\\le 5\\text{ minutes}\" data-index-in-node=\"0\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mrel\"\u003e≤\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e5\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e minutes\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,11,0,0\"\u003e\u003cb data-path-to-node=\"8,11,0,0\" data-index-in-node=\"0\"\u003eCooling Method\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,11,1,0\"\u003e\u003cb data-path-to-node=\"8,11,1,0\" data-index-in-node=\"0\"\u003eWater Cooled\u003c\/b\u003e (\u003cspan class=\"math-inline\" data-math=\"1\" data-index-in-node=\"14\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e1\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e to \u003cspan class=\"math-inline\" data-math=\"3\\text{ L\/min}\" data-index-in-node=\"19\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e3\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e L\/min\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e flow rate requirement)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,12,0,0\"\u003e\u003cb data-path-to-node=\"8,12,0,0\" data-index-in-node=\"0\"\u003ePurge Gas Flow Rate\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,12,1,0\"\u003eRecommended \u003cspan class=\"math-inline\" data-math=\"20\" data-index-in-node=\"12\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e20\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e to \u003cspan class=\"math-inline\" data-math=\"30\\text{ mL\/min}\" data-index-in-node=\"18\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e30\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e mL\/min\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e (\u003cspan class=\"math-inline\" data-math=\"SCCM\" data-index-in-node=\"36\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord mathnormal\"\u003eSCCM\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,13,0,0\"\u003e\u003cb data-path-to-node=\"8,13,0,0\" data-index-in-node=\"0\"\u003eCompatible Controllers\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,13,1,0\"\u003eShimadzu EI-S04M \/ EI-D303M power supply units\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,14,0,0\"\u003e\u003cb data-path-to-node=\"8,14,0,0\" data-index-in-node=\"0\"\u003eWeight\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,14,1,0\"\u003e\u003cspan class=\"math-inline\" data-math=\"14\\text{ kg}\" data-index-in-node=\"0\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e14\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e kg\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e (\u003cspan class=\"math-inline\" data-math=\"31.0\\text{ lbs}\" data-index-in-node=\"14\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e31.0\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e lbs\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003ch2 data-path-to-node=\"10\"\u003e\u003c\/h2\u003e\n\u003ch2 data-path-to-node=\"10\"\u003eApplications \u0026amp; Compatibility\u003c\/h2\u003e\n\u003cul data-path-to-node=\"11\"\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"11,0,0\" id=\"p-rc_dfa0afe9bfd11562-71\"\u003e\u003cspan class=\"citation-111 citation-end-111\"\u003eSemiconductor Processing (Etch, CVD, Ashing)\u003csup class=\"superscript\" data-turn-source-index=\"7\"\u003e\u003c\/sup\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cdiv class=\"source-inline-chip-container luminous-sources hide-from-message-actions ng-star-inserted\"\u003e\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"11,1,0\" id=\"p-rc_dfa0afe9bfd11562-72\"\u003e\u003cspan class=\"citation-110 citation-end-110\"\u003eCorrosive Gas R\u0026amp;D Experiments\u003csup class=\"superscript\" data-turn-source-index=\"8\"\u003e\u003c\/sup\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cdiv class=\"source-inline-chip-container luminous-sources hide-from-message-actions ng-star-inserted\"\u003e\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"11,2,0\" id=\"p-rc_dfa0afe9bfd11562-73\"\u003e\u003cspan class=\"citation-109 citation-end-109\"\u003eIon Beam and Electron Beam Instrumentation\u003csup class=\"superscript\" data-turn-source-index=\"9\"\u003e\u003c\/sup\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cdiv class=\"source-inline-chip-container luminous-sources hide-from-message-actions ng-star-inserted\"\u003e\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"11,3,0\" id=\"p-rc_dfa0afe9bfd11562-74\"\u003e\u003cspan class=\"citation-108 citation-end-108\"\u003eIndustrial Surface Coatings \u0026amp; Vacuum Metallurgy\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Shimadzu","offers":[{"title":"Default Title","offer_id":47029536587965,"sku":null,"price":6499.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/1016\/9021\/files\/ShimadzuTMP303LMC_1.jpg?v=1782758532","url":"https:\/\/labvac.com\/products\/shimadzu-tmp-303lmc-a1-magnetically-levitated-turbomolecular-pump","provider":"Labvac","version":"1.0","type":"link"}