{"product_id":"shimadzu-ei-d3413m-turbomolecular-pump-controller-with-included-tpb-60d","title":"Shimadzu EI-D3413M Turbomolecular Pump Controller with Included TPB-60D","description":"\u003cp\u003eThe Shimadzu EI-D3413M is a high-capacity digital controller designed to power and manage Shimadzu magnetically levitated turbomolecular pumps (such as the EI-3413M series). Operating completely oil-free through 5-axis active magnetic levitation, the controller delivers precise motor frequency drive, rotor position sensing, and automatic braking control.\u003c\/p\u003e\n\u003cp\u003eThis unit includes the companion \u003cb\u003eShimadzu TPB-60D Power Box \/ Power Supply Module\u003c\/b\u003e, providing stable power conditioning, high-current drive delivery, and enhanced electrical surge protection required for high-throughput semiconductor wafer tools and large-scale industrial vacuum coating systems.\u003c\/p\u003e\n\u003ch3\u003eTechnical Specifications\u003c\/h3\u003e\n\u003cdiv class=\"horizontal-scroll-wrapper\"\u003e\n\u003cdiv class=\"table-block-component\"\u003e\n\u003cdiv class=\"table-block has-export-button new-table-style is-at-scroll-start is-at-scroll-end\"\u003e\n\u003cdiv class=\"table-content md-content\"\u003e\n\u003ctable\u003e\n\u003cthead\u003e\n\u003ctr\u003e\n\u003cth\u003e\u003cspan\u003eParameter\u003c\/span\u003e\u003c\/th\u003e\n\u003cth\u003e\u003cspan\u003eSpecification Details\u003c\/span\u003e\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003c\/thead\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eController Model\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eEI-D3413M\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eIncluded Power Module\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eTPB-60D Power Box\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eManufacturer\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eShimadzu Corporation\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eCompatible Pump\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eShimadzu EI-3413M \/ EI-Series Mag-Lev Turbomolecular Pumps\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eControl Architecture\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e5-Axis Active Magnetic Levitation \u0026amp; Inverter Motor Drive\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eInput Voltage\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e200–240 VAC, 3-Phase or 1-Phase Configurable, 50\/60 Hz\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eInterface Options\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eRS-232C Serial, Remote Parallel I\/O, Status Relay Interlocks\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eCooling Method\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eForced Air (Internal Fan Cooled)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eMounting Format\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eStandard 19\" Rack-Mount \/ Modular Stack Chassis\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eCombined Weight\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e~65 lbs (29.5 kg)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003ch3\u003e\u003c\/h3\u003e\n\u003ch3\u003eTarget Applications\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cp\u003eSemiconductor Wafer Manufacturing (Plasma Etch, CVD, PVD)\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eFlat Panel Display (FPD) \u0026amp; OLED Vacuum Deposition\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eIndustrial Thin-Film Glass \u0026amp; Optical Coating\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eHigh-Energy Physics \u0026amp; Large UHV Research Facilities\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eOEM Tool Controller \/ Power Supply Retrofitting\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Shimadzu","offers":[{"title":"Default Title","offer_id":48359436058813,"sku":null,"price":7295.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/1016\/9021\/files\/ShimadzuEI-D3413M_1.jpg?v=1788303710","url":"https:\/\/labvac.com\/products\/shimadzu-ei-d3413m-turbomolecular-pump-controller-with-included-tpb-60d","provider":"Labvac","version":"1.0","type":"link"}