{"product_id":"seiko-seiki-edwards-stp-h301c-turbomolecular-pump","title":"Seiko Seiki \/ Edwards STP-H301C Turbomolecular Pump","description":"\u003cp data-path-to-node=\"1\"\u003eThe \u003cb data-path-to-node=\"1\" data-index-in-node=\"4\"\u003eSeiko Seiki\/BOC Edwards STP-H301C\u003c\/b\u003e (often branded under \u003cb data-path-to-node=\"1\" data-index-in-node=\"47\"\u003eBOC Edwards\u003c\/b\u003e) (PN: YT34-80-080) is a high-throughput, magnetically levitated turbomolecular vacuum pump engineered specifically for harsh industrial applications. By utilizing an advanced magnetic bearing system, it eliminates the risk of oil contamination and significantly reduces mechanical wear. This makes it a preferred choice for high-duty-cycle semiconductor manufacturing, plasma etching, and chemical vapor deposition (CVD) environments.\u003c\/p\u003e\n\u003ch3 data-path-to-node=\"3\"\u003eTechnical Specifications\u003c\/h3\u003e\n\u003cdiv class=\"horizontal-scroll-wrapper\"\u003e\n\u003cdiv class=\"table-block-component\"\u003e\n\u003cdiv class=\"table-block has-export-button new-table-style is-at-scroll-start is-at-scroll-end\"\u003e\n\u003cdiv class=\"table-content\" data-hveid=\"0\" data-ved=\"0CAAQ3ecQahcKEwih7cKnlNqVAxUAAAAAHQAAAAAQHQ\"\u003e\n\u003ctable data-path-to-node=\"4\"\u003e\n\u003cthead\u003e\n\u003ctr\u003e\n\u003cth\u003e\u003cspan data-path-to-node=\"4,0,0,0\"\u003eParameter\u003c\/span\u003e\u003c\/th\u003e\n\u003cth\u003e\u003cspan data-path-to-node=\"4,0,1,0\"\u003eSpecification Details\u003c\/span\u003e\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003c\/thead\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"4,1,0,0\"\u003e\u003cb data-path-to-node=\"4,1,0,0\" data-index-in-node=\"0\"\u003ePumping Speed\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\n\u003cp data-path-to-node=\"4,1,1,0\"\u003e\u003cspan class=\"math-inline\" data-math=\"N_2\" data-index-in-node=\"0\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e\u003cspan class=\"mord mathnormal\"\u003eN\u003c\/span\u003e\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t vlist-t2\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e2\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-s\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e: 300 l\/s\u003c\/p\u003e\n\u003cbr data-path-to-node=\"4,1,1,1\"\u003e\n\u003cp data-path-to-node=\"4,1,1,2\"\u003e\u003cspan class=\"math-inline\" data-math=\"H_2\" data-index-in-node=\"1\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e\u003cspan class=\"mord mathnormal\"\u003eH\u003c\/span\u003e\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t vlist-t2\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e2\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-s\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e: 200 l\/s\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"4,2,0,0\"\u003e\u003cb data-path-to-node=\"4,2,0,0\" data-index-in-node=\"0\"\u003eCompression Ratio\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\n\u003cp data-path-to-node=\"4,2,1,0\"\u003e\u003cspan class=\"math-inline\" data-math=\"N_2\" data-index-in-node=\"0\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e\u003cspan class=\"mord mathnormal\"\u003eN\u003c\/span\u003e\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t vlist-t2\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e2\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-s\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e: \u003cspan class=\"math-inline\" data-math=\"\u0026gt; 10^8\" data-index-in-node=\"5\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mrel\"\u003e\u0026gt;\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e1\u003c\/span\u003e\u003cspan class=\"mord\"\u003e0\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e8\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cbr data-path-to-node=\"4,2,1,1\"\u003e\n\u003cp data-path-to-node=\"4,2,1,2\"\u003e\u003cspan class=\"math-inline\" data-math=\"H_2\" data-index-in-node=\"1\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e\u003cspan class=\"mord mathnormal\"\u003eH\u003c\/span\u003e\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t vlist-t2\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e2\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-s\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e: \u003cspan class=\"math-inline\" data-math=\"\u0026gt; 10^3\" data-index-in-node=\"6\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mrel\"\u003e\u0026gt;\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e1\u003c\/span\u003e\u003cspan class=\"mord\"\u003e0\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e3\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"4,3,0,0\"\u003e\u003cb data-path-to-node=\"4,3,0,0\" data-index-in-node=\"0\"\u003eInlet Flange Options\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"4,3,1,0\"\u003eISO100K \/ VG100 \/ DN100CF\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"4,4,0,0\"\u003e\u003cb data-path-to-node=\"4,4,0,0\" data-index-in-node=\"0\"\u003eForeline (Outlet) Flange\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"4,4,1,0\"\u003eKF40\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"4,5,0,0\"\u003e\u003cb data-path-to-node=\"4,5,0,0\" data-index-in-node=\"0\"\u003ePurge Port\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"4,5,1,0\"\u003eKF10\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"4,6,0,0\"\u003e\u003cb data-path-to-node=\"4,6,0,0\" data-index-in-node=\"0\"\u003eBearing Type\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"4,6,1,0\"\u003e5-Axis Magnetic Levitation\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"4,7,0,0\"\u003e\u003cb data-path-to-node=\"4,7,0,0\" data-index-in-node=\"0\"\u003eCompatible Controller\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"4,7,1,0\"\u003eSCU-H301C\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003ch3 data-path-to-node=\"6\"\u003e\u003cbr\u003e\u003c\/h3\u003e\n\u003ch3 data-path-to-node=\"6\"\u003eKey Features \u0026amp; Capabilities\u003c\/h3\u003e\n\u003cul data-path-to-node=\"7\"\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"7,0,0\"\u003e\u003cb data-path-to-node=\"7,0,0\" data-index-in-node=\"0\"\u003eHarsh Process Compatibility:\u003c\/b\u003e The \"C\" designation indicates specialized internal anti-corrosion treatments, protecting the rotor and stator components from aggressive corrosive gases like chlorine, fluorine, and bromine chemistries.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"7,1,0\"\u003e\u003cb data-path-to-node=\"7,1,0\" data-index-in-node=\"0\"\u003eZero Oil Contamination:\u003c\/b\u003e The fully magnetic bearing suspension requires no lubrication oil, ensuring an ultra-clean, hydrocarbon-free vacuum environment.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"7,2,0\"\u003e\u003cb data-path-to-node=\"7,2,0\" data-index-in-node=\"0\"\u003eThermal Management System (TMS) Ready:\u003c\/b\u003e Optimized temperature distribution prevents gas condensation and byproduct deposition inside the pump casing, drastically extending maintenance intervals.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"7,3,0\"\u003e\u003cb data-path-to-node=\"7,3,0\" data-index-in-node=\"0\"\u003eHigh Gas Throughput:\u003c\/b\u003e Advanced rotor profiling accommodates higher gas loads without compromising ultimate pressure performance.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3 data-path-to-node=\"8\"\u003eCommon Applications\u003c\/h3\u003e\n\u003cul data-path-to-node=\"9\"\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"9,0,0\"\u003e\u003cb data-path-to-node=\"9,0,0\" data-index-in-node=\"0\"\u003eSemiconductor Processing\u003c\/b\u003e (Metal\/Polysilicon Plasma Etching)\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"9,1,0\"\u003e\u003cb data-path-to-node=\"9,1,0\" data-index-in-node=\"0\"\u003eThin-Film Deposition\u003c\/b\u003e (CVD, PECVD, MOCVD, Sputtering)\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"9,2,0\"\u003e\u003cb data-path-to-node=\"9,2,0\" data-index-in-node=\"0\"\u003eIon Implantation\u003c\/b\u003e (Source and beamline pumping)\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"9,3,0\"\u003e\u003cb data-path-to-node=\"9,3,0\" data-index-in-node=\"0\"\u003eFlat Panel Display (FPD)\u003c\/b\u003e manufacturing\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Edwards","offers":[{"title":"Default Title","offer_id":47660404572349,"sku":null,"price":8495.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/1016\/9021\/files\/Edwards-SSSTP-H301C_1.jpg?v=1784306800","url":"https:\/\/labvac.com\/products\/seiko-seiki-edwards-stp-h301c-turbomolecular-pump","provider":"Labvac","version":"1.0","type":"link"}