{"product_id":"seiko-seiki-edwards-scu-h1303cv3-turbomolecular-pump-controller","title":"Seiko Seiki \/ Edwards SCU-H1303CV3 Turbomolecular Pump Controller","description":"\u003cp\u003eThe Seiko Seiki \/ Edwards SCU-H1303CV3 is an advanced, heavy-duty digital controller designed specifically for the STP-H1303CV3 series magnetically levitated turbomolecular pumps. The \"CV3\" specification designates support for corrosive chemical process variants equipped with Temperature Management Systems (TMS). The controller regulates 5-axis magnetic rotor suspension, motor speed, and integrated heating band power to prevent process gas condensation, ensuring maximum operational reliability in severe semiconductor fabrication environments.\u003c\/p\u003e\n\u003ch4\u003eTechnical Specifications\u003c\/h4\u003e\n\u003cdiv class=\"horizontal-scroll-wrapper\"\u003e\n\u003cdiv class=\"table-block-component\"\u003e\n\u003cdiv class=\"table-block has-export-button new-table-style is-at-scroll-start is-at-scroll-end\"\u003e\n\u003cdiv class=\"table-content md-content\"\u003e\n\u003ctable\u003e\n\u003cthead\u003e\n\u003ctr\u003e\n\u003cth\u003e\u003cspan\u003eParameter\u003c\/span\u003e\u003c\/th\u003e\n\u003cth\u003e\u003cspan\u003eSpecification Details\u003c\/span\u003e\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003c\/thead\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eModel \/ Part Number\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eSCU-H1303CV3\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eManufacturer\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eSeiko Seiki \/ Edwards Vacuum\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eCompatible Pump\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eEdwards \/ Seiko Seiki STP-H1303CV3 Series\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eDrive Architecture\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e5-Axis Magnetic Bearing Suspension \u0026amp; TMS Temperature Control\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eInput Voltage\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e200–240 VAC, 1-Phase, 50\/60 Hz\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eTMS Control Interface\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eIntegrated Heater Power Output \u0026amp; Thermal Sensor Inputs\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eInterface Options\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eRS-232C \/ RS-485, Remote Parallel I\/O, Emergency Interlocks\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eDimensions\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eApprox. 6.8\" H x 19.0\" W x 16.5\" D (173 mm x 483 mm x 419 mm)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eWeight\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e~37.5 lbs (17 kg)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003ch4\u003e\u003c\/h4\u003e\n\u003ch4\u003eTarget Applications\u003c\/h4\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cp\u003eCorrosive Semiconductor Processing (Etch, CVD, PECVD)\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eFlat Panel Display (FPD) Vacuum Systems\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eSolar \u0026amp; Photovoltaic Layer Deposition\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eDirect Replacement for Legacy Seiko Seiki Control Racks\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Edwards","offers":[{"title":"Default Title","offer_id":48111047147709,"sku":null,"price":5295.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/1016\/9021\/files\/EdwardsSCU-H1303CV3_1.jpg?v=1787009803","url":"https:\/\/labvac.com\/products\/seiko-seiki-edwards-scu-h1303cv3-turbomolecular-pump-controller","provider":"Labvac","version":"1.0","type":"link"}