{"product_id":"osaka-vacuum-tg1113mbw-09-turbomolecular-pump","title":"Osaka Vacuum TG1113MBW-09 Turbomolecular Pump","description":"\u003cp\u003eThe Osaka Vacuum TG1113MBW-09 is a high-capacity, 5-axis magnetically levitated turbomolecular pump engineered for oil-free, ultra-clean high-vacuum environments. Built with active electromagnetic suspension, it eliminates contact friction and lubricant contamination, offering low vibration and extended operational service life.\u003c\/p\u003e\n\u003cp\u003eThe \"MBW\" specification denotes a high-throughput, water-cooled configuration with an ISO-flanged intake, while the \"-09\" dash code indicates a specific OEM hardware revision tailored for semiconductor wafer processing and industrial vacuum equipment platforms. It provides continuous stability during heavy process gas loads and includes built-in thermal protection to safeguard the rotor and magnetic bearing array.\u003c\/p\u003e\n\u003ch3\u003eTechnical Specifications\u003c\/h3\u003e\n\u003cdiv class=\"horizontal-scroll-wrapper\"\u003e\n\u003cdiv class=\"table-block-component\"\u003e\n\u003cdiv class=\"table-block has-export-button new-table-style is-at-scroll-start is-at-scroll-end\"\u003e\n\u003cdiv class=\"table-content md-content\"\u003e\n\u003ctable\u003e\n\u003cthead\u003e\n\u003ctr\u003e\n\u003cth\u003e\u003cspan\u003eParameter\u003c\/span\u003e\u003c\/th\u003e\n\u003cth\u003e\u003cspan\u003eSpecification Details\u003c\/span\u003e\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003c\/thead\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eModel \/ Dash Number\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eTG1113MBW-09 (TG 1113 Series)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eManufacturer\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eOsaka Vacuum, Ltd.\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eInlet Flange\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eISO 200 (ISO-F)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eOutlet Flange\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eKF-40 (NW40)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003ePumping Speed (N2)\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e~1,100 L\/s\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eRated Speed\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e~33,600 RPM\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eBearing System\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e5-Axis Active Magnetic Levitation\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eCooling Method\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eWater Cooled (\"W\" Variant)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eMounting Orientation\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eUniversal \/ Any Direction\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eCompatible Controller\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eOsaka TC010MA \/ TC1100 Series Digital Drive\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eWeight\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e~75 lbs (34 kg)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003ch3\u003e\u003cbr\u003e\u003c\/h3\u003e\n\u003ch3\u003eTarget Applications\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cp\u003eSemiconductor Wafer Manufacturing (Plasma Etch, CVD, PVD)\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eFlat Panel Display (FPD) \u0026amp; OLED Vacuum Deposition\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eSolar Cell \u0026amp; Thin-Film Photovoltaic Layer Deposition\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eIndustrial Surface Coating \u0026amp; Optical Thin-Film Systems\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eHigh-Energy Physics \u0026amp; National Laboratory UHV Systems\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Osaka","offers":[{"title":"Default Title","offer_id":48384925139133,"sku":null,"price":15295.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/1016\/9021\/files\/OsakaTG1113MBW-09_1.jpg?v=1788532808","url":"https:\/\/labvac.com\/products\/osaka-vacuum-tg1113mbw-09-turbomolecular-pump","provider":"Labvac","version":"1.0","type":"link"}