{"product_id":"edwards-stp-1003c-turbomolecular-pump","title":"Edwards STP-1003C Turbomolecular Pump","description":"\u003cp\u003eThis \u003cb\u003eEdwards STP-1003C turbomolecular pump\u003c\/b\u003e is a robust and high-performance vacuum solution designed for demanding applications, particularly in the semiconductor industry and other advanced technology fields. \u003cspan class=\"citation-63 citation-end-63\"\u003eThe 'C' designation signifies its corrosion-resistant build, making it suitable for processes involving aggressive gases.\u003csup class=\"superscript\" data-turn-source-index=\"1\"\u003e\u003c\/sup\u003e\u003c\/span\u003e \u003cspan class=\"citation-62 citation-end-62\"\u003eIts magnetic levitation technology ensures oil-free, low-vibration, and virtually maintenance-free operation.\u003c\/span\u003e\u003c\/p\u003e\n\u003chr\u003e\n\u003cp\u003e \u003c\/p\u003e\n\u003ch3\u003eKey Features:\u003c\/h3\u003e\n\u003cp\u003e \u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cp\u003e\u003cb\u003eMagnetic Levitation (MagLev) Technology:\u003c\/b\u003e Eliminates mechanical wear and vibration, leading to ultra-low vibration levels (\u0026lt; 0.02 µm peak-to-peak typical), extended pump life, and significantly reduced maintenance requirements.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003e\u003cb\u003eCorrosion Resistance (C Version):\u003c\/b\u003e\u003cspan class=\"citation-61 citation-end-61\"\u003e Features special anti-corrosion treatments (e.g., nickel-coated rotors and stators) making it ideal for processes involving harsh gases like chlorine, fluorine, and bromine found in semiconductor etching and deposition.\u003csup class=\"superscript\" data-turn-source-index=\"3\"\u003e\u003c\/sup\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003e\u003cb\u003eHigh Pumping Speed:\u003c\/b\u003e\u003cspan class=\"citation-60 citation-end-60\"\u003e Delivers an impressive pumping speed of 1000 l\/s for N₂ and 800 l\/s for H₂, ensuring rapid and efficient evacuation of large vacuum chambers.\u003csup class=\"superscript\" data-turn-source-index=\"4\"\u003e\u003c\/sup\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003e\u003cspan class=\"citation-59\"\u003e\u003c\/span\u003e\u003cb\u003e\u003cspan class=\"citation-59\"\u003eOil-Free Operation:\u003c\/span\u003e\u003c\/b\u003e\u003cspan class=\"citation-59 citation-end-59\"\u003e Guarantees a hydrocarbon-free vacuum, critical for high-purity applications in semiconductor manufacturing, surface analysis, and scientific instrumentation.\u003csup class=\"superscript\" data-turn-source-index=\"5\"\u003e\u003c\/sup\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003e\u003cspan class=\"citation-58\"\u003e\u003c\/span\u003e\u003cb\u003e\u003cspan class=\"citation-58\"\u003eVersatile Installation:\u003c\/span\u003e\u003c\/b\u003e\u003cspan class=\"citation-58 citation-end-58\"\u003e Can be installed in any orientation, offering flexibility in system design and integration.\u003csup class=\"superscript\" data-turn-source-index=\"6\"\u003e\u003c\/sup\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003e\u003cspan class=\"citation-57\"\u003e\u003c\/span\u003e\u003cb\u003e\u003cspan class=\"citation-57\"\u003eAdvanced Safety Features:\u003c\/span\u003e\u003c\/b\u003e\u003cspan class=\"citation-57 citation-end-57\"\u003e Equipped with backup mechanical bearings for protection during power failures or sudden air ingress.\u003csup class=\"superscript\" data-turn-source-index=\"7\"\u003e\u003c\/sup\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003e\u003cb\u003eWide Application Range:\u003c\/b\u003e\u003cspan class=\"citation-56 citation-end-56\"\u003e Suitable for semiconductor processes (plasma etch, CVD, sputtering), ion implantation, beamline pumping, mass spectrometry, and electron microscopy.\u003csup class=\"superscript\" data-turn-source-index=\"8\"\u003e\u003c\/sup\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003chr\u003e\n\u003cp\u003e \u003c\/p\u003e\n\u003ch3\u003eSpecifications:\u003c\/h3\u003e\n\u003cp\u003e \u003c\/p\u003e\n\u003cdiv class=\"horizontal-scroll-wrapper\"\u003e\n\u003cdiv class=\"table-block-component\"\u003e\n\u003cdiv class=\"table-block has-export-button\"\u003e\n\u003cdiv class=\"table-content not-end-of-paragraph\" data-hveid=\"0\" data-ved=\"0CAAQ3ecQahgKEwjDpPzdms-PAxUAAAAAHQAAAAAQgQM\"\u003e\n\u003ctable\u003e\n\u003cthead\u003e\n\u003ctr\u003e\n\u003ctd\u003eFeature\u003c\/td\u003e\n\u003ctd\u003eSpecification\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/thead\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cb\u003eManufacturer\u003c\/b\u003e\u003c\/td\u003e\n\u003ctd\u003eEdwards Vacuum\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cb\u003eModel\u003c\/b\u003e\u003c\/td\u003e\n\u003ctd\u003eSTP-1003C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cb\u003ePumping Speed (N₂)\u003c\/b\u003e\u003c\/td\u003e\n\u003ctd\u003e1000 l\/s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cb\u003ePumping Speed (H₂)\u003c\/b\u003e\u003c\/td\u003e\n\u003ctd\u003e800 l\/s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cb\u003eInlet Flange\u003c\/b\u003e\u003c\/td\u003e\n\u003ctd\u003eISO200F (also compatible with ISO200K, DN200CF, ISO250F)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cb\u003eOutlet Port\u003c\/b\u003e\u003c\/td\u003e\n\u003ctd\u003eKF40\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cb\u003ePurge Port\u003c\/b\u003e\u003c\/td\u003e\n\u003ctd\u003eKF10\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cb\u003eUltimate Pressure (with bake-out)\u003c\/b\u003e\u003c\/td\u003e\n\u003ctd\u003e10⁻⁷ Pa (10⁻⁹ Torr) (VG\/ISO flange) \u0026lt;br\u0026gt; 10⁻⁸ Pa (10⁻¹⁰ Torr) (ICF flange)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cb\u003eMax Continuous Outlet Pressure\u003c\/b\u003e\u003c\/td\u003e\n\u003ctd\u003e13 Pa (0.1 Torr)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cb\u003eRated Speed\u003c\/b\u003e\u003c\/td\u003e\n\u003ctd\u003e35,000 rpm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cb\u003eStart-up Time (to full speed)\u003c\/b\u003e\u003c\/td\u003e\n\u003ctd\u003eApprox. 6 minutes\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cb\u003ePower Consumption (Continuous)\u003c\/b\u003e\u003c\/td\u003e\n\u003ctd\u003e~800 VA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cb\u003eInput Voltage\u003c\/b\u003e\u003c\/td\u003e\n\u003ctd\u003e100-240 VAC (Universal)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cb\u003eCooling Method\u003c\/b\u003e\u003c\/td\u003e\n\u003ctd\u003eNatural Air Cooling (Water cooling option available)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cb\u003ePump Weight\u003c\/b\u003e\u003c\/td\u003e\n\u003ctd\u003eApprox. 31 kg\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cb\u003eController Compatibility\u003c\/b\u003e\u003c\/td\u003e\n\u003ctd\u003eTypically SCU-750 or SCU-800\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e","brand":"Edwards","offers":[{"title":"Default Title","offer_id":45449537650877,"sku":null,"price":21985.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/1016\/9021\/files\/ExhaustSideBlurred_ae8a4d0e-f5dc-429c-bd0d-c414295da197.jpg?v=1757606194","url":"https:\/\/labvac.com\/products\/edwards-stp-1003c-turbomolecular-pump","provider":"Labvac","version":"1.0","type":"link"}