{"product_id":"edwards-seiko-seiki-scu-1600-lon-turbomolecular-pump-controller","title":"Edwards \/ Seiko Seiki SCU-1600 LON Turbomolecular Pump Controller","description":"\u003cp id=\"p-rc_e283bfded66b62c1-65\"\u003e\u003cspan class=\"citation-101\"\u003eThe \u003c\/span\u003e\u003cb\u003e\u003cspan class=\"citation-101\"\u003eEdwards \/ Seiko Seiki SCU-1600 LON \u003c\/span\u003e\u003c\/b\u003e\u003cspan class=\"citation-101\"\u003e(Part Number: YT76-Z2-Z20)\u003c\/span\u003e\u003cspan class=\"citation-101 citation-end-101\"\u003e is a fully digital, high-capacity turbomolecular pump control unit designed specifically for large-class, 5-axis magnetically levitated (mag-lev) STP turbo pumps (ranging from 2,000 L\/s to 4,500 L\/s).\u003csup class=\"superscript\"\u003e\u003c\/sup\u003e\u003c\/span\u003e\u003cspan class=\"source-title\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cdiv class=\"source-inline-chip-container luminous-sources hide-from-message-actions ng-star-inserted\"\u003e\u003c\/div\u003e\n\u003cp id=\"p-rc_e283bfded66b62c1-66\"\u003eFeaturing built-in \u003cb\u003eLonWorks (LON) network communication\u003c\/b\u003e, this controller is tailored for high-density semiconductor tool integration, allowing automated multi-pump control, remote telemetry reporting, and streamlined tool networking. \u003cspan class=\"citation-100 citation-end-100\"\u003eIt includes advanced predictive maintenance algorithms, built-in Temperature Management System (TMS) support, and active vibration suppression to maximize process uptime.\u003csup class=\"superscript\"\u003e\u003c\/sup\u003e\u003c\/span\u003e\u003cspan class=\"source-title\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cdiv class=\"source-inline-chip-container luminous-sources hide-from-message-actions ng-star-inserted\"\u003e\u003c\/div\u003e\n\u003ch2\u003e\u003cb\u003eKey Features \u0026amp; Benefits\u003c\/b\u003e\u003c\/h2\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cp\u003e\u003cb\u003eLonWorks (LON) Fieldbus Integration:\u003c\/b\u003e Enables seamless multi-node industrial network communication directly with host semiconductor process equipment.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp id=\"p-rc_e283bfded66b62c1-67\"\u003e\u003cb\u003eUniversal High-Capacity Support:\u003c\/b\u003e \u003cspan class=\"citation-99 citation-end-99\"\u003eEngineered to drive large-capacity mag-lev STP-series pumps (2,000 to 4,500 L\/s class).\u003csup class=\"superscript\"\u003e\u003c\/sup\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cdiv class=\"source-inline-chip-container luminous-sources hide-from-message-actions ng-star-inserted\"\u003e\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003e\u003cb\u003eActive Magnetic Levitation \u0026amp; Tuning:\u003c\/b\u003e Digitally regulates 5-axis active magnetic bearings to eliminate physical bearing friction and reduce rotor vibration.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp id=\"p-rc_e283bfded66b62c1-68\"\u003e\u003cb\u003eAdvanced Predictive Maintenance:\u003c\/b\u003e \u003cspan class=\"citation-98 citation-end-98\"\u003eTracks rotor imbalance, backup bearing wear limits, and thermal thresholds to warn operators before unexpected tool downtime occurs.\u003csup class=\"superscript\"\u003e\u003c\/sup\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003cdiv class=\"source-inline-chip-container luminous-sources hide-from-message-actions ng-star-inserted\"\u003e\u003c\/div\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003e\u003cb\u003eIntegrated TMS Controller:\u003c\/b\u003e Built-in Temperature Management System driver prevents corrosive process gas condensation inside the pump chamber.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch2\u003e\u003cb\u003eTechnical Specifications\u003c\/b\u003e\u003c\/h2\u003e\n\u003cdiv class=\"horizontal-scroll-wrapper\"\u003e\n\u003cdiv class=\"table-block-component\"\u003e\n\u003cdiv class=\"table-block has-export-button new-table-style is-at-scroll-start is-at-scroll-end\"\u003e\n\u003cdiv class=\"table-content md-content\"\u003e\n\u003ctable\u003e\n\u003cthead\u003e\n\u003ctr\u003e\n\u003cth\u003e\u003cspan\u003eFeature \/ Metric\u003c\/span\u003e\u003c\/th\u003e\n\u003cth\u003e\u003cspan\u003eSpecification\u003c\/span\u003e\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003c\/thead\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eManufacturer\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eEdwards Vacuum \/ Seiko Seiki\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eModel\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e\u003ccode\u003eSCU-1600 LON\u003c\/code\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eInput Voltage\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e200 to 240 VAC (\u003cspan class=\"math-inline\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e±\u003c\/span\u003e\u003cspan class=\"mord\"\u003e10%\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e), 50\/60 Hz\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003ePower Consumption\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eMax 1,500 VA (without TMS) \/ Max 2,100 VA (with TMS)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eMotor Drive System\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e3-Phase DC Brushless Motor Driver\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eLevitation Drive\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eDigital 5-Axis Active Magnetic Bearing System\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eCommunication Ports\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eLonWorks (LON), RS232 \/ RS485 Serial, Remote I\/O\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eDimensions (H x W x L)\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e132.5 mm x 209.7 mm x 498.5 mm (5.2\" x 8.25\" x 19.6\")\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eWeight\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e~11.0 kg to 12.0 kg (~24 to 26 lbs)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003ePrimary Pump Class\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eSTP-A2203 \/ A2503 \/ A2803 \/ A3003 \/ A3503 \/ XA4503 Series\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003ch2\u003e\u003cb\u003e\u003c\/b\u003e\u003c\/h2\u003e\n\u003ch2\u003e\u003cb\u003eTypical Applications\u003c\/b\u003e\u003c\/h2\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cp\u003eHigh-Density Semiconductor Etch, CVD, and Implantation\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eFlat Panel Display (FPD) and Solar Cell Production\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eExtreme High-Vacuum (XHV) and Large-Chambers R\u0026amp;D\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eMulti-Pump Automated Tool Interfaces via LonWorks Network\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Edwards","offers":[{"title":"Default Title","offer_id":47928800280765,"sku":null,"price":7398.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/1016\/9021\/files\/EdwardsSCU-1600LON_1.jpg?v=1785463182","url":"https:\/\/labvac.com\/products\/edwards-seiko-seiki-scu-1600-lon-turbomolecular-pump-controller","provider":"Labvac","version":"1.0","type":"link"}