{"product_id":"edwards-scu-1500-universal-digital-stp-turbomolecular-pump-controller","title":"Edwards SCU-1500 Universal Digital STP Turbomolecular Pump Controller","description":"\u003cp data-path-to-node=\"3\"\u003eThe \u003cb data-path-to-node=\"3\" data-index-in-node=\"4\"\u003eEdwards SCU-1500\u003c\/b\u003e (originally designed under the Seiko Seiki banner) is a high-capacity, fully digital \u003cb data-path-to-node=\"3\" data-index-in-node=\"106\"\u003e5-axis magnetic bearing controller\u003c\/b\u003e engineered to operate heavy-duty, high-throughput STP series turbomolecular vacuum pumps. This controller is famous for its exceptional reliability in high-uptime industrial semiconductor fabrication lines, plasma etching, and chemical vapor deposition (CVD) environments.\u003c\/p\u003e\n\u003cp data-path-to-node=\"4\"\u003eThe SCU-1500 features an advanced \u003cb data-path-to-node=\"4\" data-index-in-node=\"34\"\u003e3-phase brushless DC motor driving network\u003c\/b\u003e paired with proactive magnetic suspension monitoring. It continuously samples the position sensors of the pump's rotor, processing multi-axis balance adjustments in real time to guarantee ultra-low vibration harmonics. It includes native support for an integrated \u003cb data-path-to-node=\"4\" data-index-in-node=\"341\"\u003eTemperature Management System (TMS)\u003c\/b\u003e to regulate internal pump temperatures and eliminate chemical condensation or byproduct deposition during aggressive gas processing.\u003c\/p\u003e\n\u003cul data-path-to-node=\"5\"\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"5,0,0\"\u003e\u003cb data-path-to-node=\"5,0,0\" data-index-in-node=\"0\"\u003eAdvanced 5-Axis Magnetic Stabilization:\u003c\/b\u003e Active microprocessor monitoring ensures friction-free levitation, eliminating bearing wear and background vibrational interference.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"5,1,0\"\u003e\u003cb data-path-to-node=\"5,1,0\" data-index-in-node=\"0\"\u003eIntegrated TMS Control Unit:\u003c\/b\u003e Direct logic connectivity handles internal pump heaters and cooling parameters to manage corrosive process gas environments.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"5,2,0\"\u003e\u003cb data-path-to-node=\"5,2,0\" data-index-in-node=\"0\"\u003eIndustrial Noise Immunity:\u003c\/b\u003e Excellent EMC isolation shielding guards against electrical line disruptions typical of semiconductor cleanrooms and industrial facilities.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"5,3,0\"\u003e\u003cb data-path-to-node=\"5,3,0\" data-index-in-node=\"0\"\u003eComprehensive Automated Safeguards:\u003c\/b\u003e Real-time interlock protection for pump overheating, electrical overload, rotational overspeed, power failures, and levitation anomalies.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"5,4,0\"\u003e\u003cb data-path-to-node=\"5,4,0\" data-index-in-node=\"0\"\u003eRobust Communication \u0026amp; Control Arrays:\u003c\/b\u003e Supports automated remote operations via extensive parallel I\/O links alongside dedicated RS-232C\/RS-485 serial interfaces.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch2 data-path-to-node=\"7\"\u003eTechnical Specifications \u0026amp; Pump Compatibility\u003c\/h2\u003e\n\u003cdiv class=\"horizontal-scroll-wrapper\"\u003e\n\u003cdiv class=\"table-block-component\"\u003e\n\u003cdiv class=\"table-block has-export-button new-table-style is-at-scroll-start is-at-scroll-end\"\u003e\n\u003cdiv class=\"table-content\" data-hveid=\"0\" data-ved=\"0CAAQ3ecQahgKEwjf-KX08a-VAxUAAAAAHQAAAAAQuAM\"\u003e\n\u003ctable data-path-to-node=\"8\"\u003e\n\u003cthead\u003e\n\u003ctr\u003e\n\u003cth\u003e\u003cspan data-path-to-node=\"8,0,0,0\"\u003eParameter\u003c\/span\u003e\u003c\/th\u003e\n\u003cth\u003e\u003cspan data-path-to-node=\"8,0,1,0\"\u003eSpecification\u003c\/span\u003e\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003c\/thead\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,1,0,0\"\u003e\u003cb data-path-to-node=\"8,1,0,0\" data-index-in-node=\"0\"\u003eManufacturer\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,1,1,0\"\u003eEdwards Vacuum (Originally Seiko Seiki, Japan)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,2,0,0\"\u003e\u003cb data-path-to-node=\"8,2,0,0\" data-index-in-node=\"0\"\u003eModel Array\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,2,1,0\"\u003eSCU-1500 Control Unit\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,3,0,0\"\u003e\u003cb data-path-to-node=\"8,3,0,0\" data-index-in-node=\"0\"\u003eCommon Part Numbers\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,3,1,0\"\u003e\u003cb data-path-to-node=\"8,3,1,0\" data-index-in-node=\"0\"\u003ePT59-ZS-Z00\u003c\/b\u003e | \u003cb data-path-to-node=\"8,3,1,0\" data-index-in-node=\"14\"\u003ePT59Z1Z00\u003c\/b\u003e (TELIUS Track \/ OEM Spec Variations)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,4,0,0\"\u003e\u003cb data-path-to-node=\"8,4,0,0\" data-index-in-node=\"0\"\u003ePrimary Input Power\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,4,1,0\"\u003e\u003cspan class=\"math-inline\" data-math=\"200\\text{ to }240\\text{ VAC } (\\pm10\\%)\" data-index-in-node=\"0\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e200\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e to \u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e240\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e VAC \u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"mopen\"\u003e(\u003c\/span\u003e\u003cspan class=\"mord\"\u003e±\u003c\/span\u003e\u003cspan class=\"mord\"\u003e10%\u003c\/span\u003e\u003cspan class=\"mclose\"\u003e)\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e, Single-Phase, \u003cspan class=\"math-inline\" data-math=\"50\/60\\text{ Hz}\" data-index-in-node=\"55\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e50\/60\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e Hz\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,5,0,0\"\u003e\u003cb data-path-to-node=\"8,5,0,0\" data-index-in-node=\"0\"\u003ePower Consumption\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,5,1,0\"\u003e\u003cspan class=\"math-inline\" data-math=\"1,500\\text{ VA}\" data-index-in-node=\"0\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e1\u003c\/span\u003e\u003cspan class=\"mpunct\"\u003e,\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e500\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e VA\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e max (Base mode) | Up to \u003cspan class=\"math-inline\" data-math=\"$2,100\\text{ VA\" data-index-in-node=\"40\"\u003e\u003cspan class=\"katex-error\" title=\"ParseError: KaTeX parse error: Can't use function '$' in math mode at position 1: $̲2,100\\text{ VA\"\u003e$2,100\\text{ VA\u003c\/span\u003e\u003c\/span\u003e (With active TMS)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,6,0,0\"\u003e\u003cb data-path-to-node=\"8,6,0,0\" data-index-in-node=\"0\"\u003eMotor Drive Output\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,6,1,0\"\u003e3-Phase Brushless DC, Up to \u003cspan class=\"math-inline\" data-math=\"80\\text{ VAC}\" data-index-in-node=\"28\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e80\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e VAC\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e at \u003cspan class=\"math-inline\" data-math=\"550\\text{ Hz}\" data-index-in-node=\"45\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e550\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e Hz\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e max\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,7,0,0\"\u003e\u003cb data-path-to-node=\"8,7,0,0\" data-index-in-node=\"0\"\u003eFront Panel Interface\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,7,1,0\"\u003e2x20 Character Backlit LCD screen with tactile parameter keys\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,8,0,0\"\u003e\u003cb data-path-to-node=\"8,8,0,0\" data-index-in-node=\"0\"\u003eStatus LED Displays\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,8,1,0\"\u003ePower, Accel, Normal, Brake, Temp Ctrl, Remote, Failure\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,9,0,0\"\u003e\u003cb data-path-to-node=\"8,9,0,0\" data-index-in-node=\"0\"\u003eSerial Ports\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,9,1,0\"\u003e9-pin RS-232C \/ RS-485 Interface connectors\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,10,0,0\"\u003e\u003cb data-path-to-node=\"8,10,0,0\" data-index-in-node=\"0\"\u003eMass \/ Weight\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"8,10,1,0\"\u003e\u003cspan class=\"math-inline\" data-math=\"11.0\\text{ kg}\" data-index-in-node=\"0\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e11.0\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e kg\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e (\u003cspan class=\"math-inline\" data-math=\"24.2\\text{ lbs}\" data-index-in-node=\"16\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e24.2\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e lbs\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003ch3 data-path-to-node=\"9\"\u003e\u003c\/h3\u003e\n\u003ch3 data-path-to-node=\"9\"\u003eCertified STP Pump Head Compatibility:\u003c\/h3\u003e\n\u003cul data-path-to-node=\"10\"\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"10,0,0\"\u003e\u003cb data-path-to-node=\"10,0,0\" data-index-in-node=\"0\"\u003eSTP-XA2703 Series\u003c\/b\u003e (Throughput Advanced Line)\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"10,1,0\"\u003e\u003cb data-path-to-node=\"10,1,0\" data-index-in-node=\"0\"\u003eSTP-XA3203 Series\u003c\/b\u003e\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"10,2,0\"\u003e\u003cb data-path-to-node=\"10,2,0\" data-index-in-node=\"0\"\u003eSTP-A2203 \/ A2503 \/ A3003\u003c\/b\u003e Heavy-Duty Configurations\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch2 data-path-to-node=\"12\"\u003eApplications \u0026amp; Tooling Integration\u003c\/h2\u003e\n\u003cul data-path-to-node=\"13\"\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"13,0,0\"\u003eAdvanced Semiconductor Fabrications (Etch, CVD, PVD, Ashing)\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"13,1,0\"\u003eHigh-Capacity Industrial Coaters and Flat Panel Display Manufacturing\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"13,2,0\"\u003eExtreme Throughput Corrosive Gas Chemical R\u0026amp;D Operations\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"13,3,0\"\u003eTool integrations on Tokyo Electron (TEL) Telius track platforms\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Edwards","offers":[{"title":"Default Title","offer_id":47169623359677,"sku":null,"price":6249.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/1016\/9021\/files\/EdwardsSCU1500_1.jpg?v=1782930398","url":"https:\/\/labvac.com\/products\/edwards-scu-1500-universal-digital-stp-turbomolecular-pump-controller","provider":"Labvac","version":"1.0","type":"link"}