{"product_id":"edwards-scu-1003c-turbomolecular-pump-controller-1","title":"Edwards SCU-STP-H1000C Turbomolecular Pump","description":"\u003cp\u003eThe Seiko Seiki \/ Edwards STP-H1000C is a high-performance, magnetically levitated turbomolecular pump engineered for ultra-clean, hydrocarbon-free high-vacuum environments. Built with a 5-axis active magnetic bearing suspension system, it completely eliminates physical contact and oil lubrication, providing low vibration and long-term operational stability. The \"H\" (High-Throughput) series combined with the \"C\" (Corrosive Process) variant features internal protective coatings, elevated rotor temperature capability, and purge gas management designed to handle heavy process gas loads in aggressive semiconductor etch and deposition tools.\u003c\/p\u003e\n\u003ch3\u003eTechnical Specifications\u003c\/h3\u003e\n\u003cdiv class=\"horizontal-scroll-wrapper\"\u003e\n\u003cdiv class=\"table-block-component\"\u003e\n\u003cdiv class=\"table-block has-export-button new-table-style is-at-scroll-start is-at-scroll-end\"\u003e\n\u003cdiv class=\"table-content md-content\"\u003e\n\u003ctable\u003e\n\u003cthead\u003e\n\u003ctr\u003e\n\u003cth\u003e\u003cspan\u003eParameter\u003c\/span\u003e\u003c\/th\u003e\n\u003cth\u003e\u003cspan\u003eSpecification Details\u003c\/span\u003e\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003c\/thead\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eModel \/ Series\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eSTP-H1000C\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eManufacturer\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eSeiko Seiki \/ Edwards Vacuum\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eInlet Flange\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eISO-200F\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eOutlet Flange\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eKF-40 (NW40)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003ePumping Speed (N2)\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e~1,000 L\/s\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003ePumping Speed (H2)\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e~900 L\/s\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eBearing System\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e5-Axis Active Magnetic Levitation\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eCooling Method\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eWater Cooled\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eMounting Orientation\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eUniversal \/ Any Direction\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eCompatible Controller\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eSeiko Seiki \/ Edwards SCU-H1000C \/ SCU-H803 \/ SCU-1400 Series\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eDimensions\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eApprox. 15.2\" H x 11.8\" Outer Diameter (386 mm x 300 mm)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eWeight\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e~88 lbs (40 kg)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/div\u003e\n\u003cdiv class=\"table-footer hide-on-print hide-from-message-actions\"\u003e\n\u003cbutton class=\"mdc-icon-button mat-mdc-icon-button mat-mdc-button-base mat-badge mat-unthemed mat-badge-overlap mat-badge-above mat-badge-after mat-badge-small mat-badge-hidden ng-star-inserted\"\u003e\u003cspan class=\"mat-mdc-button-persistent-ripple mdc-icon-button__ripple\"\u003e\u003c\/span\u003e\u003cspan class=\"mat-focus-indicator\"\u003e\u003c\/span\u003e\u003cspan class=\"mat-mdc-button-touch-target\"\u003e\u003c\/span\u003e\u003c\/button\u003e\u003cbr\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003ch3\u003eTarget Applications\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cp\u003eSemiconductor Wafer Fabrication (Plasma Etch, CVD, PECVD, PVD)\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eSolar \u0026amp; Photovoltaic Cell Manufacturing\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eFlat Panel Display (FPD) Vacuum Deposition\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eIndustrial Thin-Film Coating \u0026amp; Vacuum Metallurgy\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eUltra-High Vacuum (UHV) R\u0026amp;D Research Facilities\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Edwards","offers":[{"title":"Default Title","offer_id":48359308263613,"sku":null,"price":9995.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/1016\/9021\/files\/EdwardsSTP-H1000C_1.jpg?v=1788302082","url":"https:\/\/labvac.com\/products\/edwards-scu-1003c-turbomolecular-pump-controller-1","provider":"Labvac","version":"1.0","type":"link"}