{"product_id":"ebara-et-600-ws-turbomolecular-vacuum-pump","title":"Ebara ET 600 WS Turbomolecular Vacuum Pump","description":"\u003cp data-path-to-node=\"6\"\u003eThe \u003cb data-path-to-node=\"6\" data-index-in-node=\"4\"\u003eEbara ET 600 WS\u003c\/b\u003e is an industrial-grade, water-cooled turbomolecular vacuum pump engineered to provide clean, reliable, high-speed evacuation for demanding semiconductor manufacturing, thin-film deposition, and complex laboratory R\u0026amp;D applications. Delivering a robust pumping speed of \u003cspan class=\"math-inline\" data-math=\"600\\text{ L\/sec}\" data-index-in-node=\"288\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e600\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e L\/sec\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e for Nitrogen (\u003cspan class=\"math-inline\" data-math=\"N_2\" data-index-in-node=\"319\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e\u003cspan class=\"mord mathnormal\"\u003eN\u003c\/span\u003e\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t vlist-t2\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e2\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-s\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e), this high-vacuum pump utilizes a high-efficiency rotor design operating at \u003cspan class=\"math-inline\" data-math=\"35,000\\text{ RPM}\" data-index-in-node=\"400\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e35\u003c\/span\u003e\u003cspan class=\"mpunct\"\u003e,\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e000\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e RPM\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e to achieve exceptional compression ratios and ultra-low ultimate pressures.\u003c\/p\u003e\n\u003cp data-path-to-node=\"7\"\u003eBuilt for maximum durability in harsh environments, the ET 600 WS features high-load bearing structures and an integrated water-cooling manifold. This design manages heavy thermal loads effectively, ensuring structural integrity and preventing process-gas condensation during continuous high-throughput operations.\u003c\/p\u003e\n\u003ch2 data-path-to-node=\"9\"\u003eTechnical Specifications\u003c\/h2\u003e\n\u003cdiv class=\"horizontal-scroll-wrapper\"\u003e\n\u003cdiv class=\"table-block-component\"\u003e\n\u003cdiv class=\"table-block has-export-button new-table-style is-at-scroll-start is-at-scroll-end\"\u003e\n\u003cdiv class=\"table-content\" data-hveid=\"0\" data-ved=\"0CAAQ3ecQahgKEwjc3tW-8aKVAxUAAAAAHQAAAAAQ5wI\"\u003e\n\u003ctable data-path-to-node=\"10\"\u003e\n\u003cthead\u003e\n\u003ctr\u003e\n\u003cth\u003e\u003cspan data-path-to-node=\"10,0,0,0\"\u003eParameter\u003c\/span\u003e\u003c\/th\u003e\n\u003cth\u003e\u003cspan data-path-to-node=\"10,0,1,0\"\u003eSpecification\u003c\/span\u003e\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003c\/thead\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,1,0,0\"\u003e\u003cb data-path-to-node=\"10,1,0,0\" data-index-in-node=\"0\"\u003eManufacturer\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,1,1,0\"\u003eEbara Corporation\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,2,0,0\"\u003e\u003cb data-path-to-node=\"10,2,0,0\" data-index-in-node=\"0\"\u003eModel\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,2,1,0\"\u003eET 600 WS (ET600W Series)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,3,0,0\"\u003e\u003cb data-path-to-node=\"10,3,0,0\" data-index-in-node=\"0\"\u003eInlet Flange\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,3,1,0\"\u003eVG150\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,4,0,0\"\u003e\u003cb data-path-to-node=\"10,4,0,0\" data-index-in-node=\"0\"\u003eExhaust\/Foreline Flange\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,4,1,0\"\u003eKF25\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,5,0,0\"\u003e\u003cb data-path-to-node=\"10,5,0,0\" data-index-in-node=\"0\"\u003ePumping Speed (\u003cspan class=\"math-inline\" data-math=\"N_2\" data-index-in-node=\"15\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e\u003cspan class=\"mord mathnormal\"\u003eN\u003c\/span\u003e\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t vlist-t2\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e2\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-s\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e)\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,5,1,0\"\u003e\u003cspan class=\"math-inline\" data-math=\"600\\text{ L\/sec}\" data-index-in-node=\"0\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e600\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e L\/sec\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,6,0,0\"\u003e\u003cb data-path-to-node=\"10,6,0,0\" data-index-in-node=\"0\"\u003eRotational Speed\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,6,1,0\"\u003e\u003cspan class=\"math-inline\" data-math=\"35,000\\text{ RPM}\" data-index-in-node=\"0\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e35\u003c\/span\u003e\u003cspan class=\"mpunct\"\u003e,\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e000\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e RPM\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,7,0,0\"\u003e\u003cb data-path-to-node=\"10,7,0,0\" data-index-in-node=\"0\"\u003eCompression Ratio (\u003cspan class=\"math-inline\" data-math=\"N_2\" data-index-in-node=\"19\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e\u003cspan class=\"mord mathnormal\"\u003eN\u003c\/span\u003e\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t vlist-t2\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e2\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-s\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e)\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,7,1,0\"\u003e\u003cspan class=\"math-inline\" data-math=\"\u0026gt; 1 \\times 10^9\" data-index-in-node=\"0\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mrel\"\u003e\u0026gt;\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e1\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003cspan class=\"mbin\"\u003e×\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e1\u003c\/span\u003e\u003cspan class=\"mord\"\u003e0\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e9\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,8,0,0\"\u003e\u003cb data-path-to-node=\"10,8,0,0\" data-index-in-node=\"0\"\u003eUltimate Pressure\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,8,1,0\"\u003eUp to \u003cspan class=\"math-inline\" data-math=\"7.5 \\times 10^{-9}\\text{ Torr}\" data-index-in-node=\"6\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e7.5\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003cspan class=\"mbin\"\u003e×\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e1\u003c\/span\u003e\u003cspan class=\"mord\"\u003e0\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e−9\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e Torr\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e (\u003cspan class=\"math-inline\" data-math=\"1 \\times 10^{-7}\\text{ Pa}\" data-index-in-node=\"38\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e1\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003cspan class=\"mbin\"\u003e×\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e1\u003c\/span\u003e\u003cspan class=\"mord\"\u003e0\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e−7\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e Pa\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e order)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,9,0,0\"\u003e\u003cb data-path-to-node=\"10,9,0,0\" data-index-in-node=\"0\"\u003eCooling System\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,9,1,0\"\u003eWater-Cooled (Flow Rate \u003cspan class=\"math-inline\" data-math=\"\u0026gt; 2\\text{ L\/min}\" data-index-in-node=\"24\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mrel\"\u003e\u0026gt;\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e2\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e L\/min\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,10,0,0\"\u003e\u003cb data-path-to-node=\"10,10,0,0\" data-index-in-node=\"0\"\u003eRun-up Time\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,10,1,0\"\u003e\u003cspan class=\"math-inline\" data-math=\"\u0026lt; 8\\text{ minutes}\" data-index-in-node=\"0\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mrel\"\u003e\u0026lt;\u003c\/span\u003e\u003cspan class=\"mspace\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e8\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e minutes\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,11,0,0\"\u003e\u003cb data-path-to-node=\"10,11,0,0\" data-index-in-node=\"0\"\u003eWeight\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,11,1,0\"\u003eApprox. \u003cspan class=\"math-inline\" data-math=\"77\\text{ lbs}\" data-index-in-node=\"8\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e77\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e lbs\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e (\u003cspan class=\"math-inline\" data-math=\"35\\text{ kg}\" data-index-in-node=\"23\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e35\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e kg\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,12,0,0\"\u003e\u003cb data-path-to-node=\"10,12,0,0\" data-index-in-node=\"0\"\u003eCompatible Controller\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan data-path-to-node=\"10,12,1,0\"\u003eEbara ET600W Drive Controller (e.g., ETC04 Series)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003ch2 data-path-to-node=\"12\"\u003e\u003c\/h2\u003e\n\u003ch2 data-path-to-node=\"12\"\u003eKey Features \u0026amp; Benefits\u003c\/h2\u003e\n\u003cul data-path-to-node=\"13\"\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"13,0,0\"\u003e\u003cb data-path-to-node=\"13,0,0\" data-index-in-node=\"0\"\u003eHigh Process Throughput:\u003c\/b\u003e Optimized blade geometry provides a \u003cspan class=\"math-inline\" data-math=\"600\\text{ L\/sec}\" data-index-in-node=\"61\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e600\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e L\/sec\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e volumetric speed, ideal for rapid chamber cycling and continuous chemical gas loads.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"13,1,0\"\u003e\u003cb data-path-to-node=\"13,1,0\" data-index-in-node=\"0\"\u003eAdvanced Thermal Management:\u003c\/b\u003e Heavy-duty water-cooling framework allows the pump to tolerate high back-stream pressures and intense process radiation without overheating.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"13,2,0\"\u003e\u003cb data-path-to-node=\"13,2,0\" data-index-in-node=\"0\"\u003eUltra-Clean Vacuum Performance:\u003c\/b\u003e Precision mechanical tolerances allow the pump to achieve ultimate pressures in the \u003cspan class=\"math-inline\" data-math=\"10^{-9}\\text{ Torr}\" data-index-in-node=\"116\"\u003e\u003cspan class=\"katex\"\u003e\u003cspan class=\"katex-html\" aria-hidden=\"true\"\u003e\u003cspan class=\"base\"\u003e\u003cspan class=\"strut\"\u003e\u003c\/span\u003e\u003cspan class=\"mord\"\u003e1\u003c\/span\u003e\u003cspan class=\"mord\"\u003e0\u003cspan class=\"msupsub\"\u003e\u003cspan class=\"vlist-t\"\u003e\u003cspan class=\"vlist-r\"\u003e\u003cspan class=\"vlist\"\u003e\u003cspan class=\"\"\u003e\u003cspan class=\"pstrut\"\u003e\u003c\/span\u003e\u003cspan class=\"sizing reset-size6 size3 mtight\"\u003e\u003cspan class=\"mord mtight\"\u003e−9\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003cspan class=\"mord text\"\u003e\u003cspan class=\"mord\"\u003e Torr\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e range, minimizing hydrocarbons or residual process contaminants.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp data-path-to-node=\"13,3,0\"\u003e\u003cb data-path-to-node=\"13,3,0\" data-index-in-node=\"0\"\u003eFlexible Mounting Orientation:\u003c\/b\u003e Engineered structural balance allows the pump to be mounted in any spatial orientation required by the tool layout.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Ebara","offers":[{"title":"Default Title","offer_id":47008469188797,"sku":null,"price":11749.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/1016\/9021\/files\/EbaraET600WS_1.jpg?v=1782417419","url":"https:\/\/labvac.com\/products\/ebara-et-600-ws-turbomolecular-vacuum-pump","provider":"Labvac","version":"1.0","type":"link"}