{"product_id":"cti-cryo-is-320fx-cryopump","title":"CTI Cryo IS-320FX Cryopump","description":"\u003cp\u003eThe CTI-Cryogenics IS-320FX is a high-performance, integrated smart cryopump designed to deliver clean, oil-free high-vacuum environments for demanding semiconductor and industrial thin-film deposition applications. Equipped with advanced onboard control architecture, the IS-320FX features integrated drive electronics that streamline communication, automate regeneration, and continuously monitor system health. Its robust two-stage closed-loop Helium refrigeration design provides high water vapor and hydrogen pumping speeds, optimizing chamber pump-down times and maximizing process yield.\u003c\/p\u003e\n\u003ch3\u003eTechnical Specifications\u003c\/h3\u003e\n\u003cdiv class=\"horizontal-scroll-wrapper\"\u003e\n\u003cdiv class=\"table-block-component\"\u003e\n\u003cdiv class=\"table-block has-export-button new-table-style is-at-scroll-start is-at-scroll-end\"\u003e\n\u003cdiv class=\"table-content md-content\"\u003e\n\u003ctable\u003e\n\u003cthead\u003e\n\u003ctr\u003e\n\u003cth\u003e\u003cspan\u003eParameter\u003c\/span\u003e\u003c\/th\u003e\n\u003cth\u003e\u003cspan\u003eSpecification Details\u003c\/span\u003e\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003c\/thead\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003ePart Number\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e8185419G001\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eFlange Size \/ Type\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eISO-320 \/ ANSI Flange Interface\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003ePumping Mechanism\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e2-Stage Gifford-McMahon (GM) Cryogenic Refrigerator\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eControl Architecture\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eOn-Board \/ IS-Series Integrated Smart Controller\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eCompressor Compatibility\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eCTI 9600 Compressor Series \/ IS-compatible Helium Lines\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eFirst Stage Temp Range\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e65K – 80K\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eSecond Stage Temp Range\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e10K – 20K\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eRegeneration Type\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eAutomated \/ Intelligent On-Board Cycle\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eDimensions\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003eApprox. 22\" H x 18\" W x 16\" D\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cspan\u003e\u003cb\u003eWeight\u003c\/b\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan\u003e~85 lbs (38.5 kg)\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e \u003c\/p\u003e\n\u003ch3\u003eTarget Applications\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cp\u003eSemiconductor Wafer Processing (PVD, CVD, Etch)\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eOptical Coating \u0026amp; Thin-Film Deposition Systems\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eFlat Panel Display (FPD) Manufacturing\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eIndustrial Surface Modification \u0026amp; Vacuum Metallurgy\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003eHigh-Vacuum Research Chamber Environments\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e","brand":"Edwards","offers":[{"title":"Default Title","offer_id":47978458415293,"sku":null,"price":9549.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0662\/1016\/9021\/files\/CTICryoIS-320FXOnboard_1.jpg?v=1786465497","url":"https:\/\/labvac.com\/products\/cti-cryo-is-320fx-cryopump","provider":"Labvac","version":"1.0","type":"link"}